DocumentCode
2519103
Title
Infrared detection of carbon monoxide with a micromechanically tunable silicon fabry-perot filter
Author
Sagberg, H. ; Ferber, Alain ; Haugholt, K.H. ; Johansen, Ib-Rune
Author_Institution
Oslo Univ.
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
171
Lastpage
172
Abstract
Robust sensing of carbon monoxide is possible with a tunable correlation filter. We demonstrate a silicon Fabry-Perot filter with high optical throughput, where an adjustable hidden airgap allows for the necessary tuning
Keywords
carbon compounds; gas sensors; infrared detectors; micro-optics; microsensors; optical filters; optical sensors; optical tuning; silicon; CO; Si; carbon monoxide; correlation filter; infrared detection; micromechanically tunable silicon Fabry-Perot filter; Absorption; Band pass filters; Biosensors; Fabry-Perot; Gas detectors; Infrared detectors; Optical filters; Optical sensors; Silicon; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540133
Filename
1540133
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