DocumentCode
2519123
Title
Atomic force microscopy with optical heterodyne detection method
Author
Kim, Min-Su ; Manzardo, O. ; Dandliker, R. ; Herzig, H.P. ; Aeschimann, L. ; Staufer, Urs ; Vettiger, P. ; Lee, Joun-Ho
Author_Institution
Inst. of Microtechnol., Neuchatel Univ.
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
173
Lastpage
174
Abstract
We report on an atomic force microscope (AFM) based on a simple optical set-up using heterodyne detection. The deflection of the cantilever in the AFM was interferometrically measured using a Michelson interferometer. At a scanning speed of 2 mum/s and an integration time of 10 ms, the measured vertical resolution was 0.4 nm. The lateral resolution was 20 nm and is determined by the scanning speed and the integration time
Keywords
Michelson interferometers; atomic force microscopy; heterodyne detection; measurement by laser beam; 10 ms; 2 micron/s; Michelson interferometer; atomic force microscopy; cantilever deflection; laser interferometry; optical heterodyne detection method; Atom optics; Atomic force microscopy; Instruments; Laser beams; Optical detectors; Optical interferometry; Optical microscopy; Optical mixing; Optical polarization; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540134
Filename
1540134
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