Title :
Deformable mems grating for wide tunability
Author :
Tormen, M. ; Peter, Y.A. ; Niedermann, Ph. ; Hoogerwerf, A. ; Stanley, R.
Author_Institution :
Centre Suisse d´´Electron. et de Microtech., Neuchatel
Abstract :
A deformable MEMS grating is presented. Electrostatic actuation allows a per cent tuning of up to 2.5%. This device can be used as tuning element in an external cavity mid-infrared quantum-cascade laser
Keywords :
diffraction gratings; electrostatic actuators; laser cavity resonators; laser tuning; micro-optics; quantum cascade lasers; deformable MEMS grating; external cavity mid-infrared quantum-cascade laser; tuning element; Actuators; Gas lasers; Gratings; Laser tuning; Micromechanical devices; Optical films; Quantum cascade lasers; Springs; Testing; Tunable circuits and devices;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540135
