Title :
Spectrometer based on MOEMS shutter array
Author :
Pizzi, Marco ; Konyashkin, Valerian ; Busso, Piero ; Zelezny, Vladimir ; Vanek, Premysl ; Bursik, Josef ; Hokr, Milan ; Moilanen, Ville ; Marbach, Ralf
Author_Institution :
Centro Ricerche Fiat, Orbassano
Abstract :
In this work a MOEMS shutter array was developed to be a wavelength selective component inside the spectrometer. This paper presents the implemented spectrometer prototype based on the MOEMS shutter array
Keywords :
infrared spectrometers; micro-optics; micromechanical devices; optical arrays; optical elements; MOEMS shutter array; infrared spectrometer; Chemistry; Filters; Gratings; Mirrors; Optical sensors; Prototypes; Sensor arrays; Spectroscopy; Stress; Wavelength measurement;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540137
