Title :
A Viable NDRO FERRAM Dielectric Structure
Author :
Lampe, D.R. ; Dzimianski, J.W. ; Adams, D.A. ; Buhay, H. ; Sinharoy, S. ; Francombe, M.H.
Author_Institution :
Westinghouse Advanced Technology Division
Keywords :
Breakdown voltage; Chemical processes; Dielectric breakdown; Dielectric devices; Dielectrics and electrical insulation; FETs; Ferroelectric films; Ferroelectric materials; Silicon; Tunneling;
Conference_Titel :
Nonvolatile Memory Technology Review, 1993
Print_ISBN :
0-7803-1290-2
DOI :
10.1109/NVMT.1993.696947