DocumentCode
2519335
Title
Vernier MOEMS alignment mechanisms
Author
Syms, R.R.A. ; Zou, H. ; Stagg, J.
Author_Institution
Dept. of Electr. & Electron. Eng., Imperial Coll., London
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
197
Lastpage
198
Abstract
Positional precision in MOEMS alignment is increased beyond the value set by pattern transfer using a Vernier mechanism based on multiple rack-and-tooth latches. Two- and four-section latches are demonstrated, and limits in precision magnification identified
Keywords
micro-optics; microactuators; MOEMS alignment; microactuator; multiple rack-and-tooth latches; pattern transfer; precision magnification; vernier mechanism; Bonding; Capacitive sensors; Educational institutions; Electrothermal effects; Microactuators; Micromechanical devices; Optical devices; Portals; Springs; Teeth;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540147
Filename
1540147
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