Title :
Effects of a loop array layer on a micro-inductor for future RF MEMS components
Author :
Tassetti, Charles-Marie ; Lissorgues, Gaëlle ; Gilles, Jean-Paul
Author_Institution :
Groupe ESIEE, Cite Descartes, Noisy-Le-Grand, France
Abstract :
Tunable micro-inductors can be designed controlling magnetic coupling coefficient. This paper presents the inductance variation produced by loops strongly magnetically coupled with a micro-inductor. A compact lumped element model, based on the geometry, gives result in good agreement with measurements in the RF frequency range. Then, this model will be applied to the study of the tunable MEMS inductor described below.
Keywords :
UHF devices; electromagnetic coupling; equivalent circuits; inductance; inductors; micromechanical devices; tuning; RF MEMS components; compact lumped element model; equivalent circuit; equivalent impedance; inductance variation; loop array layer; magnetic coupling coefficient; short-circuit configuration; tunable micro-inductors; Coupling circuits; Impedance; Inductance; Inductors; Magnetic materials; Magnetic shielding; Micromechanical devices; Permeability; Radiofrequency microelectromechanical systems; Tunable circuits and devices;
Conference_Titel :
Microwave Conference, 2003. 33rd European
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMC.2003.1262210
