DocumentCode
2519448
Title
Ferroelectric PZT Thin Films For Low-voltage Nonvolatile Memory
Author
Moazzami, R. ; Maniar, P.D. ; Jones, R.E., Jr. ; Campbell, A.C. ; Mogab, C.J.
Author_Institution
Motorola, Inc.
fYear
1993
fDate
22-24 Jun 1993
Firstpage
44
Lastpage
47
Keywords
Capacitors; Ferroelectric films; Ferroelectric materials; Low voltage; Nonvolatile memory; Polarization; Random access memory; Titanium; Transistors; Zirconium;
fLanguage
English
Publisher
ieee
Conference_Titel
Nonvolatile Memory Technology Review, 1993
Print_ISBN
0-7803-1290-2
Type
conf
DOI
10.1109/NVMT.1993.696948
Filename
696948
Link To Document