Title :
Piezoelectric acoustic resonant mass sensors
Author :
Zhao, Hongyuan ; Pang, Wei ; Zhang, Hao
Author_Institution :
Coll. of Precision Instrum. & Opto-Electron. Eng., Tianjin Univ., Tianjin, China
Abstract :
Piezoelectric acoustic resonant sensors enable selective and label-free detection of biological events in real time. They are featured with self-actuating and self-detecting ability, and have been extensively explored in chemical and biological sensing applications. In this paper, four types of piezoelectric acoustic sensors operating at different resonant modes (i.e., thickness extensional mode, thickness shear mode, lateral extensional mode and flexural mode) are reviewed and discussed, with particular focus on the fundamental mechanisms and the recent biological sensing applications.
Keywords :
bioMEMS; bioacoustics; piezoelectric devices; biological sensing applications; chemical sensing applications; label-free detection; piezoelectric acoustic resonant mass sensors; resonant mode; self-actuating ability; self-detecting ability; Biosensors; DNA; Film bulk acoustic resonators; Proteins; Resonant frequency; MEMS; bio-sensing; mass sensor; piezoelectric;
Conference_Titel :
Advances in Optoelectronics and Micro/Nano-Optics (AOM), 2010 OSA-IEEE-COS
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4244-8393-8
Electronic_ISBN :
978-1-4244-8392-1
DOI :
10.1109/AOM.2010.5713583