Title :
Modeling and simulation of the thin film bulk acoustic resonator
Author :
Salgar, Sushant ; Guntae Kim ; Han, Dae-Hyun ; Kim, Bruce
Author_Institution :
Electr. Eng., Arizona State Univ., AZ, USA
Abstract :
This paper describes the modeling and simulation results for thin film BAW resonators. We present the frequency tuning mechanisms, the influence of the thickness of the electrodes and Q of the resonator. The BAW resonator was fabricated with the piezoelectric thin film and Bragg reflector.
Keywords :
Q-factor; acoustic resonators; bulk acoustic wave devices; electrodes; electronic engineering computing; piezoelectric thin films; tuning; Bragg reflector; Q factor; electrode thickness; frequency tuning mechanisms; modeling; piezoelectric thin film; simulation; thin film BAW resonators; thin film bulk acoustic resonator; Acoustic devices; Acoustic materials; Acoustic waves; Electrodes; Impedance; Piezoelectric films; Resonator filters; Substrates; Surface acoustic wave devices; Transistors;
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2002. IEEE International
Print_ISBN :
0-7803-7082-1
DOI :
10.1109/FREQ.2002.1075853
