Title :
Study of novel Love mode surface acoustic wave filters
Author :
Kalantar-zadeh, Kourosh ; Wlodarski, Wojtek ; Galatsis, Osmas ; Holland, Anthony
Author_Institution :
Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, Vic., Australia
Abstract :
Novel Love mode filters based on ZnO and SiO2/90° rotated ST-cut quartz crystal structure were fabricated. A comprehensive study was carried out to show the capabilities of such filters. The periodicity of the fingers is 50 μm and the thickness of the SiO2 and ZnO layers ranges from 0.2 to 7.2 μm. Electromechanical coupling coefficient, capacitance per unit wavelengths of finger pairs and temperature coefficient of frequency are studied in terms of thickness of the wave-guiding layers.
Keywords :
Love waves; capacitance; electromechanical effects; interdigital transducers; silicon compounds; surface acoustic wave filters; surface acoustic wave waveguides; zinc compounds; 0.2 to 7.2 micron; 50 micron; IDT; Love mode surface acoustic wave filters; SiO2; SiO2 layer thickness; SiO2/rotated ST-cut quartz crystal structure; ZnO layer thickness; ZnO-SiO2; ZnO/rotated ST-cut quartz crystal structure; electromechanical coupling coefficient; finger pairs; finger periodicity; temperature coefficient of frequency; waveguiding layer thickness; Acoustic propagation; Acoustic waves; Capacitance; Dielectric constant; Filters; Fingers; Substrates; Surface acoustic waves; Temperature; Zinc oxide;
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2002. IEEE International
Print_ISBN :
0-7803-7082-1
DOI :
10.1109/FREQ.2002.1075860
