Title :
Frequency temperature characteristics of stepped bi-mesa-shaped AT-cut quartz resonators
Author :
Goka, S. ; Sekimoto, H. ; Watanabe, Y. ; Sato, T.
Author_Institution :
Graduate Sch. of Eng., Tokyo Metropolitan Univ., Japan
Abstract :
To confirm the decoupling effect of stepped bi-mesa structures, we fabricated stepped bi-mesa resonators and measured their frequency-temperature behavior. The results showed that stepped bi-mesa resonators have better temperature characteristics than bi-mesa resonators. These results confirmed that using stepped bi-mesa structures reduces the influence of mesa edges and improves the characteristics of bi-mesa resonators.
Keywords :
coupled mode analysis; crystal resonators; electron device testing; quartz; thermal analysis; SiO2; bi-mesa resonators; decoupling effect; energy trapping effect; frequency temperature characteristics; mesa edges; mode coupling; stepped bi-mesa resonators; stepped bi-mesa structures; stepped bi-mesa-shaped AT-cut quartz resonators; temperature characteristics; Electrodes; Energy measurement; Fabrication; Frequency measurement; Hafnium; Sputtering; Temperature; Thickness measurement; Transistors; Wet etching;
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2002. IEEE International
Print_ISBN :
0-7803-7082-1
DOI :
10.1109/FREQ.2002.1075863
