Title :
Two axes quartz angular rate sensor
Author :
Bel, O. ; Bourquin, R. ; Jeanroy, A.
Author_Institution :
Ecole Nationale Superieure de Mecanique et des Microtechniques, Besancon, France
Abstract :
The aim of this paper is to present a new angular rate sensor based on six vibrating embedded beams, made on quartz or crystal of the same class of symmetry. In the first instance, we describe the original geometry based upon the crystallographic properties of quartz and explain how it works. In the second instance, we give theoretical scale factor based on the calculus of the electrical field and applying Lewis´ work [1961].
Keywords :
crystal resonators; quartz; vibrational states; SiO2; calculus; crystallographic properties; electrical field; quartz; resonant device; scale factor; vibrating embedded beams; Calculus; Chemical sensors; Costs; Electrodes; Geometry; Mechanical sensors; Parasitic capacitance; Piezoelectricity; Rotation measurement; Vibrations;
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2002. IEEE International
Print_ISBN :
0-7803-7082-1
DOI :
10.1109/FREQ.2002.1075879
