• DocumentCode
    2520569
  • Title

    Two axes quartz angular rate sensor

  • Author

    Bel, O. ; Bourquin, R. ; Jeanroy, A.

  • Author_Institution
    Ecole Nationale Superieure de Mecanique et des Microtechniques, Besancon, France
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    214
  • Lastpage
    219
  • Abstract
    The aim of this paper is to present a new angular rate sensor based on six vibrating embedded beams, made on quartz or crystal of the same class of symmetry. In the first instance, we describe the original geometry based upon the crystallographic properties of quartz and explain how it works. In the second instance, we give theoretical scale factor based on the calculus of the electrical field and applying Lewis´ work [1961].
  • Keywords
    crystal resonators; quartz; vibrational states; SiO2; calculus; crystallographic properties; electrical field; quartz; resonant device; scale factor; vibrating embedded beams; Calculus; Chemical sensors; Costs; Electrodes; Geometry; Mechanical sensors; Parasitic capacitance; Piezoelectricity; Rotation measurement; Vibrations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium and PDA Exhibition, 2002. IEEE International
  • Print_ISBN
    0-7803-7082-1
  • Type

    conf

  • DOI
    10.1109/FREQ.2002.1075879
  • Filename
    1075879
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2520569