Low cost thin film based surface acoustic wave vibration sensors for vibrational gyroscope

Author

Potter, M.D.G. ; Kirby, P.B. ; Lim, M.Y. ; Kalinin, V.A. ; Lonsdale, A.

Author_Institution

Cranfield Univ., UK

fYear

2002

fDate

2002

Firstpage

220

Lastpage

224

Abstract

Reports on the development of thin film polycrystalline zinc oxide based surface acoustic wave (SAW) resonators for use as vibration sensors on a novel low cost vibrating gyroscope structure intended for use in a GPS-INS automotive navigation system. Piezoelectric growth conditions and layer configurations are optimised to produce resonators with the high Q factor (>4000) required to detect kHz frequency strains in a macroscopic (3cm diameter) vibrating structure. The system is ultimately intended to use contact free capacitive coupling schemes to the sensors for primary and secondary mode detection. Initial strain sensitivity measurements of the SAW resonators have been performed, revealing a practical strain sensitivity of approximately 0.7845 kHz/μstrain.

Keywords

Global Positioning System; Q-factor; gyroscopes; inertial navigation; surface acoustic wave resonators; surface acoustic wave sensors; vibration measurement; 3 cm; GPS-INS automotive navigation system; Q factor; SAW resonators; ZnO; contact free capacitive coupling schemes; layer configurations; macroscopic vibrating structure; piezoelectric growth conditions; primary mode detection; secondary mode detection; strain sensitivity measurements; surface acoustic wave vibration sensors; vibrational gyroscope; Acoustic sensors; Acoustic waves; Capacitive sensors; Costs; Gyroscopes; Piezoelectric films; Sensor systems; Strain measurement; Surface acoustic waves; Thin film sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and PDA Exhibition, 2002. IEEE International

Print_ISBN

0-7803-7082-1

Type

conf

DOI

10.1109/FREQ.2002.1075880

Filename

1075880