DocumentCode :
2520635
Title :
An analysis of plate surface roughness effect for AT-cut resonators
Author :
Kuroiwa, Mayumi ; NAKAZAWA, Mitsuo
Author_Institution :
Shinshu Univ., Nagano, Japan
fYear :
2002
fDate :
2002
Firstpage :
242
Lastpage :
247
Abstract :
This paper describes the theoretical analysis regarding the resonance frequency and electrical equivalent circuit constants characteristics vs. plate surface roughnesses for the AT-cut resonators which are adsorbing and without adsorbing for relative humidity. A new electric equivalent circuit theory was proposed, and the experimental proof was conducted by means of both the impedance analyzer and network analyzer measuring systems. Our theory was agreed with experimental results. This paper describes the experimental results on the plate roughness effect of relative humidity on the AT-cut quartz humidity sensors. This research was conducted to investigate principally the mechanism with respect to the resonance frequency changes influenced by relative humidity change etc. (including the impedance changes and equivalent circuit constant fluctuations) for the above humidity sensors.
Keywords :
crystal resonators; equivalent circuits; humidity sensors; network analysers; surface topography; AT-cut resonators; electric equivalent circuit theory; electrical equivalent circuit constants characteristics; equivalent circuit constant fluctuations; impedance analyzer; impedance changes; network analyzer measuring systems; plate surface roughness effect; relative humidity; relative humidity change; resonance frequency; Electric variables measurement; Equivalent circuits; Humidity; Impedance measurement; Resonance; Resonant frequency; Rough surfaces; Sensor phenomena and characterization; Surface impedance; Surface roughness;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2002. IEEE International
Print_ISBN :
0-7803-7082-1
Type :
conf
DOI :
10.1109/FREQ.2002.1075883
Filename :
1075883
Link To Document :
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