DocumentCode
2520727
Title
Characterization of a piezoworm stage
Author
Salisbury, Shaun P. ; Mrad, Ridha Ben ; Waechter, David F. ; Prasad, S. Eswar
Author_Institution
Univ. of Toronto, Toronto
fYear
2007
fDate
4-7 Sept. 2007
Firstpage
1
Lastpage
5
Abstract
A novel complementary clamp piezoworm stage was developed to be integrated into an XY configuration for applications such as microarray manufacture. The actuator is a complementary clamp piezoworm which acts directly on the stage slide without additional coupling. Open loop tests showed that the stage is capable of a no-load speed of 8.5 mm/s, a force capacity of 6 N and can move a mass in excess of 17 kg.
Keywords
piezoelectric actuators; position control; complementary clamp piezoworm stage; inchworm actuator; microarray manufacture; piezoworm stage characterization; Bioinformatics; Clamps; Genomics; Hydraulic actuators; Industrial engineering; Manufacturing; Mechanical sensors; Piezoelectric actuators; Prototypes; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced intelligent mechatronics, 2007 IEEE/ASME international conference on
Conference_Location
Zurich
Print_ISBN
978-1-4244-1263-1
Electronic_ISBN
978-1-4244-1264-8
Type
conf
DOI
10.1109/AIM.2007.4412444
Filename
4412444
Link To Document