DocumentCode
2520736
Title
Love-waves to improve chemical sensors sensitivity: theoretical and experimental comparison of acoustic modes
Author
Zimmermann, C. ; Rebiere, D. ; Dejous, C. ; Pistre, J. ; Planade, R.
Author_Institution
Lab. IXL-UMR, Bordeaux I Univ., Talence, France
fYear
2002
fDate
2002
Firstpage
281
Lastpage
288
Abstract
Both a theoretical and experimental comparison of the sensitivities of various acoustic wave sensors is presented. From a theoretical point of view, several methods to calculate the sensor´s mass loading sensitivity are reviewed. Particular attention is turned on Love-wave devices which present a high sensitivity, and are very promising chemical sensors. Experimental tests of gas detection are presented for SAW, SH-APM and Love-wave sensors. The results are discussed. Experimental sensitivities are compared. Some hypotheses are given to explain the discrepancy between theoretical and experimental results.
Keywords
Love waves; chemical sensors; sensitivity; surface acoustic wave sensors; Love-wave sensors; SAW sensors; acoustic modes; chemical sensors; gas detection; mass loading sensitivity; Acoustic propagation; Acoustic sensors; Acoustic signal detection; Acoustic testing; Acoustic waves; Chemical sensors; Gas detectors; Substrates; Surface acoustic wave devices; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium and PDA Exhibition, 2002. IEEE International
Print_ISBN
0-7803-7082-1
Type
conf
DOI
10.1109/FREQ.2002.1075893
Filename
1075893
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