SAW reflectivity and resonator results for LGT and LGN

Author

Puccio, D. ; Saldanha, N. ; Malocha, D.C. ; da Cunha, M. Pereira

Author_Institution

Sch. of Electr. Eng. & Comput. Sci., Univ. of Central Florida, Orlando, FL, USA

fYear

2002

fDate

2002

Firstpage

324

Lastpage

327

Abstract

SAW properties are currently being investigated for the use of LGN and LGT materials. Current efforts are focused on the measurement of SAW reflectivity and resonator performance. This paper will present recent results of SAW reflectivity for various cuts and propagation directions on LGT and LGN. The measurement procedure and the parameter extraction method for the reflectivity will be discussed. Theoretical predictions of the reflectivity for aluminum electrodes, based on fundamental material parameters, will be compared to experimental measurements for various film thicknesses on differing cut angles and propagation directions. Recently fabricated SAW resonator results will be provided.

Keywords

electrodes; gallium compounds; lanthanum compounds; reflectivity; surface acoustic wave resonators; LGN; LGT; La₃Ga_5.5Nb_0.5O₁₄; La₃Ga_5.5Ta_0.5O₁₄; SAW reflectivity; SAW resonator; cut angles; film thicknesses; parameter extraction method; propagation directions; Aluminum; Delay lines; Electrodes; Frequency; Probes; Reflectivity; Surface acoustic waves; Testing; Transducers; Wavelength measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and PDA Exhibition, 2002. IEEE International

Print_ISBN

0-7803-7082-1

Type

conf

DOI

10.1109/FREQ.2002.1075901

Filename

1075901