• DocumentCode
    2521093
  • Title

    Optimization quartz crystal slicing conditions using multi-wire-saw

  • Author

    Watanabe, Takaya

  • Author_Institution
    World Technol. Instrum. Co. Ltd., Kanagawa, Japan
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    386
  • Lastpage
    393
  • Abstract
    A unidirectional multi-wire-saw is used for the slicing of LST-cut in lumbered Z-bars. The free abrasive grains cohere like a triangular strain circle when there is a speed difference in the flow of the slurry. When the wire runs, a triangular strain circle that consists of the abrasive grains does a rotary motion. The protruding portion of a triangular strain circle that rotates grinds the quartz ingot. A triangular strain circle infers that it is an analytical model of the optimum slicing. On the other hand, the running wire of the bidirectional multi-wire-saw repeats a cycle of an acceleration, a deceleration, and a stop movement. A new optimization system can solve the basic operating problems of the bidirectional multi-wire-saw. The Miller index (023~) of the BT-cut is used for the azimuth measurement of the LST-cut cutting angle. Because the orientation angle is away from the standard, the error margin of the measurement is large. The measurement of the orientation of the Bragg angle in the Z-plane uses a new Miller index (015~) as the Bragg angle. Cut angle measurement of the highly precise LST-cut then becomes possible.
  • Keywords
    angular measurement; crystal resonators; cutting; grinding; machining; measurement errors; optimisation; process control; quartz; surface acoustic wave resonators; BT-cut Miller index; LST-cut cutting angle azimuth measurement; Z-plane Bragg angle orientation measurement; acceleration; bidirectional multi-wire-saw running wire; cohering free abrasive grains; cut angle measurement; deceleration; lumbered Z-bar LST-cut slicing; measurement error margin; optimization system; optimum slicing analytical model; orientation angle; quartz SAW resonators; quartz crystal slicing condition optimization; quartz ingot grinding; repeat cycle; slurry flow speed difference; stop movement; triangular strain circle rotary motion; unidirectional multi-wire-saw; Abrasives; Acceleration; Analytical models; Capacitive sensors; Electrodes; Instruments; Mass production; Slurries; Surface acoustic waves; Wire;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium and PDA Exhibition, 2002. IEEE International
  • Print_ISBN
    0-7803-7082-1
  • Type

    conf

  • DOI
    10.1109/FREQ.2002.1075914
  • Filename
    1075914