Flexible High Performance Capacitor on Soft Elastic Material

Flexible capacitors have been realized on soft elastic material with the demonstration of good electrical and reliability performance. metal-insulator-metal (MIM) capacitors (_~2 pF to _~16 pF) were pre-fabricated by 0.18 ¿m Cu-backend technology on Si-substrate and later transferred onto the soft elastic material (polydimethylsiloxane PDMS) by the wafer-transfer technology. After transfer process development, our results show MIM capacitor can be reliably realized over elastic substrate PDMS. The changing of capacitance is below 0.3 pF for all the capacitors (from 2 pF to 16 pF). The flexible capacitors are still functional when bending radius reach 5.3 cm. At the same time, the changes of capacitance are below 3% at different bending radius.