Title :
Application of gyrotrons in research and industrial technologies
Author_Institution :
Inst. of Appl. Phys., Acad. of Sci., Nizhny Novgorod, Russia
Abstract :
Summary form only given. The creation of gyrotrons (sources of high-power electromagnetic radiation in the millimeter wavelength range) reveals new possibilities for development of efficient tools for scientific experiments and promising technologies for industrial material processing. This presentation reviews the physical basics of gyrotron applications including plasma heating and current drive in magnetic fusion setups, the creation of sources of dense plasma and beams of multi-charge ions, the deposition of polycrystalline diamond films by the CVD method, and the annealing of semiconductor structures.
Keywords :
annealing; chemical vapour deposition; gyrotrons; ion beam applications; melting; millimetre wave generation; plasma materials processing; plasma radiofrequency heating; plasma sources; C; CVD; dense plasma source creation; gyrotron application physical basics; gyrotron research/industrial technologies applications; industrial material processing; magnetic fusion setup current drive; mm-wave high-power EM radiation sources; multi-charge ion beam sources; plasma heating; polycrystalline diamond film deposition; scientific experimental tools; semiconductor structure annealing; Electromagnetic radiation; Gyrotrons; Heating; Materials processing; Millimeter wave technology; Plasma applications; Plasma density; Plasma materials processing; Plasma sources; Plasma waves;
Conference_Titel :
Infrared and Millimeter Waves, 2002. Conference Digest. Twenty Seventh International Conference on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-7423-1
DOI :
10.1109/ICIMW.2002.1076048
