DocumentCode :
2522401
Title :
Surface Layer of a Polished Crystal Plate
Author :
Fukuyo, Hitohiro ; Oura, Nobunori
fYear :
1976
fDate :
1976
Firstpage :
254
Lastpage :
258
Keywords :
Annealing; Distortion measurement; Electrodes; Ellipsometry; Etching; Frequency measurement; Geometry; Refractive index; Resonance; Resonant frequency;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
30th Annual Symposium on Frequency Control. 1976
Type :
conf
DOI :
10.1109/FREQ.1976.201322
Filename :
1540312
Link To Document :
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