Title :
Surface Layer of a Polished Crystal Plate
Author :
Fukuyo, Hitohiro ; Oura, Nobunori
Keywords :
Annealing; Distortion measurement; Electrodes; Ellipsometry; Etching; Frequency measurement; Geometry; Refractive index; Resonance; Resonant frequency;
Conference_Titel :
30th Annual Symposium on Frequency Control. 1976
DOI :
10.1109/FREQ.1976.201322