Title :
Development of a microspectrometer for the infrared range
Author :
Otto, T. ; Saupe, R. ; Bruch, R. ; Gessner, T.
Author_Institution :
Fraunhofer Inst. for Reliability & Microintegration, Germany
Abstract :
In this paper we demonstrate the development of a new microspectrometer system for the mid-infrared range (2.5 - 6 /spl mu/m). Micromechanical components are used for the system, therefore a very compact and economical spectroscopic device has been realized. First measurement results are reported as well as the functional ability of the device.
Keywords :
infrared spectrometers; micro-optics; 2.5 to 6 micron; compact device; micromechanical components; microspectrometer system; mid infrared range; mid-IR range; Biomedical measurements; Biomedical optical imaging; Gratings; Infrared spectra; Light sources; Manufacturing; Mirrors; Optical design; Radiation detectors; Spectroscopy;
Conference_Titel :
Infrared and Millimeter Waves, 2002. Conference Digest. Twenty Seventh International Conference on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-7423-1
DOI :
10.1109/ICIMW.2002.1076069
