DocumentCode
2522701
Title
Aging Effects in Plasma Etched SAW Resonators
Author
Bell, O.T. ; Miller, S.P.
fYear
1976
fDate
1976
Firstpage
358
Lastpage
362
Keywords
Aging; Etching; Oscillators; Plasma applications; Plasma devices; Plasma stability; Plasma temperature; Plasma waves; Surface acoustic wave devices; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
30th Annual Symposium on Frequency Control. 1976
Type
conf
DOI
10.1109/FREQ.1976.201338
Filename
1540328
Link To Document