DocumentCode
2523148
Title
Micromechanical slow-velocity delay lines
Author
Alastalo, Ari T ; Mattila, Tomi ; Seppä, Heikki ; Dekker, James
Author_Institution
VTT Inf. Technol., Finland
Volume
3
fYear
2003
fDate
7-9 Oct. 2003
Firstpage
967
Abstract
We consider a chain of coupled micromechanical resonators as a delay line for radio-frequency signals. Wave propagation in the chain is generated and detected using capacitive transducers. Analytical results, numerical simulations and first measurements for the response of a prototype device are presented. The delay line is shown to have a bandpass response and a very low signal group velocity of the order of only few meters per second. Weaknesses of the first prototypes are identified through simulations and a more optimal design is suggested.
Keywords
acoustic wave propagation; capacitive sensors; delay lines; micromechanical resonators; numerical analysis; bandpass response; capacitive transducers; coupled micromechanical resonators; micromechanical slow-velocity delay lines; numerical simulations; optimal design; radiofrequency signals; wave propagation; Acoustic waves; Delay lines; Information technology; Micromechanical devices; Microwave filters; Numerical simulation; Prototypes; Transducers; Vibrations; Virtual prototyping;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2003. 33rd European
Print_ISBN
1-58053-834-7
Type
conf
DOI
10.1109/EUMC.2003.177642
Filename
1262813
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