A low-loss distributed 2-bit W-band MEMS phase shifter

Author

Hung, Juo-Jung ; Dussopt, Laurent ; Rebeiz, Gabriel M.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA

Volume

3

fYear

2003

fDate

7-9 Oct. 2003

Firstpage

983

Abstract

A low-loss 2-bit wide-band distributed microelectromechanical system transmission line (DMTL) phase shifter has been developed on a 500 μm glass substrate for W-band operation. The coplanar waveguide (CPW) design is periodically loaded by MEMS switches in series with high-Q MAM (MetalAir-Metal) capacitors, and shows a reflection coefficient better than -11 dB through the whole W-band frequency range (75-110 GHz) and phase shifts of 0°, 89.3°, 180.1°, 272° at 81 GHz with an average insertion losses of -2.2 dB. This is currently the lowest-loss phase shifter at W-band frequencies.

Keywords

capacitors; coplanar transmission lines; coplanar waveguides; microswitches; phase shifters; -11 dB; -2.2 dB; 500 micron; 75 to 110 GHz; CPW; MEMS switches; W-band MEMS phase shifter; W-band frequency; coplanar waveguide; glass substrate; high-Q metal-air-metal capacitors; insertion losses; reflection coefficient; wide-band distributed microelectromechanical system transmission line; Capacitors; Coplanar transmission lines; Coplanar waveguides; Frequency; Glass; Microelectromechanical systems; Micromechanical devices; Microswitches; Phase shifters; Wideband;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2003. 33rd European

Print_ISBN

1-58053-834-7

Type

conf

DOI

10.1109/EUMC.2003.1262817

Filename

1262817