Title :
SAW properties of LiNbO3 and LiTaO3 films grown by pulsed laser deposition
Author :
Shibata, Yoshihiko ; Kuze, Naohiro ; Matsui, Masahiro ; Aya, KiyoshiI ; Kanai, Masaki ; Kawai, Tomoji
Author_Institution :
Central Lab., Asahi Chem. Ind. Co. Ltd., Shizuoka, Japan
Abstract :
LiNbO3 and LiTaO3 films are deposited on sapphire and AlN/sapphire substrates using Ar-F excimer laser ablation. The deposition and structure of the films are investigated systematically. The structure of the films is analyzed by X-ray pole figure, high-resolution X-ray diffraction and transmission electron microscopy. The results of these analysis indicate that deposited films are extremely high-quality epitaxial films. As-grown LiNbO3 and LiTaO3 films are sufficiently piezoelectric to fabricate SAW devices. The experimental data of SAW velocity (Vs) and electromechanical coupling coefficients (k2) almost coincide with the calculated data
Keywords :
X-ray diffraction; crystal structure; lithium compounds; piezoelectric thin films; pulsed laser deposition; surface acoustic wave devices; transmission electron microscopy; LiNbO3; LiNbO3 films; LiTaO3; LiTaO3 films; SAW devices; X-ray pole figure; electromechanical coupling coefficients; high-quality epitaxial films; high-resolution X-ray diffraction; piezoelectric films; pulsed laser deposition; structure; transmission electron microscopy; Couplings; Laser ablation; Piezoelectric devices; Piezoelectric films; Substrates; Surface acoustic wave devices; Surface acoustic waves; Transmission electron microscopy; X-ray diffraction; X-ray lasers;
Conference_Titel :
Frequency Control Symposium, 1996. 50th., Proceedings of the 1996 IEEE International.
Conference_Location :
Honolulu, HI
Print_ISBN :
0-7803-3309-8
DOI :
10.1109/FREQ.1996.559835
