DocumentCode
2524513
Title
Improvements to a Range Management System in an Automated Wafer Fabrication Fab
Author
Shikalgar, S.T.
Author_Institution
IBM Syst. & Technol. Group, Hopewell Junction
fYear
2007
fDate
11-12 June 2007
Firstpage
93
Lastpage
95
Abstract
The Range Management system was implemented in IBM´s 300 mm fab located in Hopewell Junction, NY. The fab processes a diverse mix of low and high volume production technologies in conjunction with processing development hardware for future technologies. The implementation of the Range Management system was modified to take advantage of the automated functioning of the fab which has resulted in substantial productivity improvements.
Keywords
automation; semiconductor device manufacture; automated wafer fabrication; productivity improvements; range management system; Dispatching; Fabrication; Hardware; Monitoring; Production systems; Productivity; Resource management; Semiconductor device manufacture; Technology management; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference, 2007. ASMC 2007. IEEE/SEMI
Conference_Location
Stresa
Print_ISBN
1-4244-0652-8
Type
conf
DOI
10.1109/ASMC.2007.4595690
Filename
4595690
Link To Document