Title :
An infrared-bi-color Schottky-barrier infrared CCD image sensor for precise thermal image
Author :
Konuma, K. ; Asano, Y. ; Masubuchi, K. ; Utsumi, H. ; Tohyama, S. ; Endo, T. ; Azuma, H. ; Teranishi, N.
Author_Institution :
Microelectron. Res. Labs., NEC Corp., Sagamihara, Japan
Abstract :
An infrared-bi-color image sensor was developed with barrier height controlled Schottky-barrier photo diode array for precise temperature image. Vertically arranged low and high barrier height diode pixels in horizontally stripe order were arranged by using a selective area ion implantation technique. Conventional monochromatic infrared image sensors have only measured the temperature for a black body object. The infrared-bi-color image sensor can precisely obtain the temperature image for gray bodies, whose emissivity values are unknown.<>
Keywords :
CCD image sensors; Schottky diodes; infrared imaging; ion implantation; photodiodes; temperature measurement; emissivity; gray bodies; infrared-bi-color Schottky-barrier infrared CCD image sensor; ion implantation; precise thermal image; Charge-coupled image sensors; Fabrication; Infrared image sensors; Ion implantation; Pixel; Schottky diodes; Sensor arrays; Temperature control; Temperature measurement; Temperature sensors;
Conference_Titel :
Electron Devices Meeting, 1994. IEDM '94. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-2111-1
DOI :
10.1109/IEDM.1994.383288
