Control of the DLC coated ball bearing linear stage in high vacuum

Author

Shim, Jongyoup ; Khim, Gyungho ; Lee, Chang-Woo ; Park, Chun-Hong

Author_Institution

Dept. of Ultraprecision Machine & Syst., Korea Inst. of Machinery & Mater., Daejeon, South Korea

fYear

2010

fDate

10-12 Sept. 2010

Firstpage

526

Lastpage

529

Abstract

A ball bearing linear stage in high vacuum is presented. Comparing with other vacuum compatible bearing this kind of stage shows simpler design, high stiffness and lower cost which is applicable in high vacuum (~10^-5 Torr). And in order to decrease friction and surface adsorbed layer induced damping, special surface finish, DLC (Diamond Like Carbon) film coating, is applied to the surface of bearing component by sputtering deposition. Control experiments were performed w/ and w/o DLC coating and experiments show control performance is improved after DLC coating both in air and in vacuum.

Keywords

ball bearings; carbon; coatings; friction; sputter deposition; diamond like carbon coated ball bearing linear stage control; diamond like carbon film coating; friction; special surface finish; sputtering deposition; surface adsorbed layer induced damping; Copper; Ball bearing; DLC (Diamond Like Carbon); High Vacuum; Precision Linear Stage; Tracking Control;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechanical and Electrical Technology (ICMET), 2010 2nd International Conference on

Conference_Location

Singapore

Print_ISBN

978-1-4244-8100-2

Electronic_ISBN

978-1-4244-8102-6

Type

conf

DOI

10.1109/ICMET.2010.5598416

Filename

5598416