Title :
Double-ended tuning fork resonator in 0.35um CMOS technology for RF applications
Author :
Lopez, J.L. ; Torres, F. ; Murillo, G. ; Giner, J. ; Teva, J. ; Verd, J. ; Uranga, A. ; Abadal, G. ; Barniol, N.
Author_Institution :
Dept. Eng. Electron., Univ. Autonoma de Barcelona (UAB), Barcelona
fDate :
June 22 2008-April 25 2008
Abstract :
A double-ended tuning fork (DETF) fabricated in a 0.35 um commercial CMOS technology is presented. Resonator performance for the application of this device in a RF front-end is measured using electrical test. DEFT offers a higher isolation between ports than clamped -clamped beams and the possibility to create a band-pass for frequency filtering or mixing using a single resonator. Discrepancies between expected and obtained results are studied using FEM mechanical simulations.
Keywords :
CMOS digital integrated circuits; band-pass filters; finite element analysis; micromechanical resonators; mixers (circuits); CMOS technology; DEFT; FEM mechanical simulations; RF application; band-pass frequency filtering; clamped beams; double-ended tuning fork resonator; Bandwidth; CMOS process; CMOS technology; Fabrication; Micromechanical devices; Radio frequency; Resonance; Resonant frequency; Resonator filters; Vibrations;
Conference_Titel :
Research in Microelectronics and Electronics, 2008. PRIME 2008. Ph.D.
Conference_Location :
Istanbul
Print_ISBN :
978-1-4244-1983-8
Electronic_ISBN :
978-1-4244-1984-5
DOI :
10.1109/RME.2008.4595732
