Title :
Integration of a microfluidic flow cell on a CMOS biosensor for DNA detection
Author :
Caboni, Alessandra ; Barbaro, Massimo ; Homsy, Alexandra ; Van der Wal, Peter ; Linder, Vincent ; de Rooij, Nico
Author_Institution :
Dept. of Electr. & Electron. Eng., Univ. of Cagliari, Cagliari
fDate :
June 22 2008-April 25 2008
Abstract :
This paper describes the fabrication technique for the realization a microfluidic flow cell to be integrated on a CMOS biosensor for DNA hybridization detection. The main element of the microfluidic system is made in polydimethylsiloxane (PDMS) elastomer and takes up an area of 5 mm2. PDMS is cast against a silicon master patterned by deep reactive ion etching (DRIE) and then bonded on the chip by means of oxygen plasma activation. The micro channels patterned in the flow cell are connected with capillary tubes that can be easily interconnected to a common syringe.
Keywords :
CMOS integrated circuits; DNA; biological techniques; elastomers; microchannel flow; molecular biophysics; plasma materials processing; sputter etching; CMOS biosensor; DNA hybridization detection; capillary tubes; deep reactive ion etching; microchannels; microfluidic flow cell; oxygen plasma activation; polydimethylsiloxane elastomer; Biosensors; Circuit testing; DNA; Digital control; FETs; Microfluidics; Multiplexing; Plasma temperature; Sensor arrays; Temperature sensors;
Conference_Titel :
Research in Microelectronics and Electronics, 2008. PRIME 2008. Ph.D.
Conference_Location :
Istanbul
Print_ISBN :
978-1-4244-1983-8
Electronic_ISBN :
978-1-4244-1984-5
DOI :
10.1109/RME.2008.4595740
