DocumentCode :
2525495
Title :
Self-aligned integration of 8/spl times/1 micromachined micro-Fresnel lens arrays and 8/spl times/1 vertical cavity surface emitting laser arrays for free-space optical interconnect
Author :
Lee, S.S. ; Lin, L.Y. ; Pister, K.S.J. ; Wu, M.C. ; Lee, C. ; Grodzinski, P.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
fYear :
1994
fDate :
11-14 Dec. 1994
Firstpage :
761
Lastpage :
764
Abstract :
A novel, three-dimensional 8/spl times/1 micro-Fresnel lens array has been realized by surface micromachining technique; three-dimensional alignment blocks and supporting structures for both the micro-Fresnel lens array and the 8/spl times/1 vertical-cavity surface-emitting laser (VCSEL) array are also realized during the same process. With the help of these three-dimensional structures, self-aligned integration of the micro-Fresnel lens array and the VCSEL array are realized with passive alignment. Individual addressing of the VCSEL/micro-lens element is also successfully demonstrated. With their three-dimensional and array structural characteristics, they are very attractive for free-space optical interconnect and optoelectronic packaging.<>
Keywords :
integrated optics; integrated optoelectronics; laser cavity resonators; lenses; micromachining; optical fabrication; optical interconnections; semiconductor laser arrays; surface emitting lasers; VCSEL arrays; free-space optical interconnect; micro-Fresnel lens arrays; micromachined lens arrays; optoelectronic packaging; passive alignment; self-aligned integration; supporting structures; surface emitting laser arrays; surface micromachining technique; three-dimensional alignment blocks; vertical cavity SEL arrays; Bandwidth; Integrated optics; Lenses; Micromachining; Optical arrays; Optical interconnections; Optical surface waves; Optical waveguides; Surface emitting lasers; Vertical cavity surface emitting lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 1994. IEDM '94. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
ISSN :
0163-1918
Print_ISBN :
0-7803-2111-1
Type :
conf
DOI :
10.1109/IEDM.1994.383312
Filename :
383312
Link To Document :
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