Self-aligned integration of 8/spl times/1 micromachined micro-Fresnel lens arrays and 8/spl times/1 vertical cavity surface emitting laser arrays for free-space optical interconnect

A novel, three-dimensional 8/spl times/1 micro-Fresnel lens array has been realized by surface micromachining technique; three-dimensional alignment blocks and supporting structures for both the micro-Fresnel lens array and the 8/spl times/1 vertical-cavity surface-emitting laser (VCSEL) array are also realized during the same process. With the help of these three-dimensional structures, self-aligned integration of the micro-Fresnel lens array and the VCSEL array are realized with passive alignment. Individual addressing of the VCSEL/micro-lens element is also successfully demonstrated. With their three-dimensional and array structural characteristics, they are very attractive for free-space optical interconnect and optoelectronic packaging.<>