DocumentCode
2525734
Title
High quality factor micromachined toroid and solenoid inductors
Author
Zine-El-Abidine, Imed ; Okoniewski, Michal
fYear
2007
fDate
8-10 Oct. 2007
Firstpage
351
Lastpage
354
Abstract
High quality toroid and solenoid inductors, exhibiting quality factors as high as 87 at 14.5 GHz and 35 at 6.4 GHz are presented in this paper. The inductors are fabricated using only two plating steps which reduces the complexity of the fabrication. The process lowers the number of ohmic contacts between the electroplated layers improving the performance of the device. The fabrication process is low-temperature and fully compatible with CMOS technology which makes it suitable for post-IC processing.
Keywords
CMOS integrated circuits; Q-factor; electroplating; inductors; micromachining; microwave integrated circuits; ohmic contacts; CMOS technology; electroplated layers; fabrication process; frequency 14.5 GHz; frequency 6.4 GHz; micromachined toroid; microwave circuits; ohmic contacts; post-IC processing; quality factor; solenoid inductors; CMOS technology; Copper; Dielectric substrates; Etching; Fabrication; Inductors; Q factor; Resists; Silicon; Solenoids; Index Terms; Inductors; micromachining; microwave circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Integrated Circuit Conference, 2007. EuMIC 2007. European
Conference_Location
Munich
Print_ISBN
978-2-87487-002-6
Type
conf
DOI
10.1109/EMICC.2007.4412721
Filename
4412721
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