Title :
High quality factor micromachined toroid and solenoid inductors
Author :
Zine-El-Abidine, Imed ; Okoniewski, Michal
Abstract :
High quality toroid and solenoid inductors, exhibiting quality factors as high as 87 at 14.5 GHz and 35 at 6.4 GHz are presented in this paper. The inductors are fabricated using only two plating steps which reduces the complexity of the fabrication. The process lowers the number of ohmic contacts between the electroplated layers improving the performance of the device. The fabrication process is low-temperature and fully compatible with CMOS technology which makes it suitable for post-IC processing.
Keywords :
CMOS integrated circuits; Q-factor; electroplating; inductors; micromachining; microwave integrated circuits; ohmic contacts; CMOS technology; electroplated layers; fabrication process; frequency 14.5 GHz; frequency 6.4 GHz; micromachined toroid; microwave circuits; ohmic contacts; post-IC processing; quality factor; solenoid inductors; CMOS technology; Copper; Dielectric substrates; Etching; Fabrication; Inductors; Q factor; Resists; Silicon; Solenoids; Index Terms; Inductors; micromachining; microwave circuits;
Conference_Titel :
Microwave Integrated Circuit Conference, 2007. EuMIC 2007. European
Conference_Location :
Munich
Print_ISBN :
978-2-87487-002-6
DOI :
10.1109/EMICC.2007.4412721
