Title :
RF MEMS switches based on the buckle-beam thermal actuator
Author :
Girbau, D. ; Lázaro, A. ; Pradell, L.
Author_Institution :
Dept. TSC, Univ. Politecnica de Catalunya, Barcelona, Spain
Abstract :
In this paper, we propose series and parallel RF MEMS-switch configurations based on the buckle-beam thermal actuator. We demonstrate the feasibility of using this actuator in RF applications with processes and materials of standard microelectronics technology. The designed switches achieve simulated on-state insertion loss of 0.09 dB and off-state isolation of -19 dB @ 2 GHz. To ease the computation of the actuator displacement, we present a simple analytical model which is validated through the results obtained from simulations in ConvertorWare™ and Sugar softwares.
Keywords :
actuators; circuit simulation; electrostatic actuators; microswitches; radiofrequency integrated circuits; 0.09 dB; 2 GHz; ConvertorWare; RF MEMS switches; RF applications; Sugar softwares; actuator displacement; analytical model; buckle-beam thermal actuator; standard microelectronics technology; Actuators; Analytical models; Computational modeling; Converters; Insertion loss; Isolation technology; Microelectronics; Radio frequency; Radiofrequency microelectromechanical systems; Switches;
Conference_Titel :
Microwave Conference, 2003. 33rd European
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMC.2003.1262974
