Title :
A study on the dielectric properties of (Sr1-xCax )TiO3 thin film
Author :
Kim, J.S. ; Cho, C.N. ; Kim, S.G. ; Shin, C.G. ; Choi, W.S. ; Lee, S.I. ; Kim, C.H. ; Lee, J.U.
Author_Institution :
Dept. of Electr. Eng., Kwangwoon Univ., Seoul, South Korea
Abstract :
The (Sr1-xCax)TiO3(SCT) thin films are deposited on Pt-coated electrodes (Pt/TiN/SiO2/Si) using RF magnetron sputtering. The structural and dielectric properties of the SCT thin films were influenced by substitutional contents of Ca. The composition of SCT thin films was close to stoichiometry (1.081~1.117 in A/B ratio). The maximum dielectric constant was obtained for a SCT15 thin film. The dielectric constant changes almost linearly in the temperature range -80~+90[°C]. The temperature properties of the dielectric loss have a stable value. The drastic decrease of dielectric constant and increase of dielectric loss in SCT thin films is observed above 100[kHz]
Keywords :
calcium compounds; dielectric losses; dielectric thin films; permittivity; sputter deposition; stoichiometry; strontium compounds; -80 to 90 degC; Pt-TiN-SiO2-Si; Pt-coated electrode; RF magnetron sputtering; SrCaTiO3; dielectric constant; dielectric loss; thin films; Dielectric constant; Dielectric losses; Dielectric thin films; Electrodes; Radio frequency; Semiconductor thin films; Sputtering; Strontium; Temperature distribution; Tin;
Conference_Titel :
Properties and Applications of Dielectric Materials, 2000. Proceedings of the 6th International Conference on
Conference_Location :
Xi´an
Print_ISBN :
0-7803-5459-1
DOI :
10.1109/ICPADM.2000.876369
