DocumentCode
2526476
Title
A micromachined tunable cavity resonator
Author
Mercier, D. ; Chatras, M. ; Orlianges, J.C. ; Champeaux, C. ; Catherinot, A. ; Blondy, P. ; Cros, D. ; Papapolymerou, J.
Author_Institution
IRCOM, Limoges, France
Volume
2
fYear
2003
fDate
7-9 Oct. 2003
Firstpage
675
Abstract
This paper focuses on a tunable resonator fabricated using bulk and surface micro-machining techniques. The resonator consists of a silicon micro-machined metalized cavity coupled with MEMS bridge capacitor for tenability purposes. The resonator is excited using coplanar waveguide lines to avoid losses from transitions and facilitate measurements. The unloaded quality factor of the device is about 150 depending on the MEMS varactor position and the simulated tuning range is 0.4 GHz (1.45%) at 27.8 GHz.
Keywords
Q-factor; cavity resonators; coplanar waveguides; micromachining; micromechanical devices; 0.4 GHz; 27.8 GHz; MEMS bridge capacitor; MEMS varactor position; bulk micromachining technique; coplanar waveguide lines; micromachined tunable cavity resonator; silicon micromachined metalized cavity; surface micromachining techniques; tunable resonator; Bridge circuits; Capacitors; Cavity resonators; Coplanar waveguides; Loss measurement; Micromechanical devices; Q factor; Silicon; Varactors; Waveguide transitions;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2003. 33rd European
Print_ISBN
1-58053-834-7
Type
conf
DOI
10.1109/EUMC.2003.1262980
Filename
1262980
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