DocumentCode :
252674
Title :
The Nanoworkbench: Automated Nanorobotic system inside of scanning electron or focused ion beam microscopes
Author :
Burkart, Ivo ; Klocke, Volker ; Maynicke, Eva
fYear :
2014
fDate :
13-16 April 2014
Firstpage :
89
Lastpage :
92
Abstract :
Many every day developments would not exist today without preparation, handling and assembly of materials under optical microscopes. There would be no wristwatch, no in vitro fertilization, no mini-gearbox, just to mention a few. These products depend on using toolsets like tweezers, knives, hooks, probes and several different measurement tools in combination with optical microscopes, since a good part of the understanding about material functions and process technologies was developed this way. But many material properties and functionalities also depend on structure dimensions that are smaller than the wavelength of light.
Keywords :
beam handling techniques; focused ion beam technology; ion microscopy; optical microscopy; robotic assembly; scanning electron microscopy; Nanoworkbench; automated nanorobotic system; focused ion beam microscopes; material assembly; material handling; material properties; optical microscopes; scanning electron microscopes; Grippers; Nanobioscience; Production systems; Scanning electron microscopy; Software;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on
Conference_Location :
Waikiki Beach, HI
Type :
conf
DOI :
10.1109/NEMS.2014.6908766
Filename :
6908766
Link To Document :
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