DocumentCode :
252684
Title :
Super hydrophobic/super hydrophilic transparent nanostructured glass fabricated by wet etching
Author :
Kumar, Ajit ; Kashyap, Kunal ; Kai Wei Liao ; Hou, Max T. ; Yeh, J. Andrew
Author_Institution :
Inst. of Nanoengineering & Microsyst., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fYear :
2014
fDate :
13-16 April 2014
Firstpage :
113
Lastpage :
116
Abstract :
Glass nanostructures were fabricated by wet chemical etching instead of using the complicated nanolithography and expensive dry etching process. Super hydrophilic glass with contact angle of 1° was created using this nanostructure with 92% transparency. Self-assembled monolayer of Perfluorodecyl-trichlorosilane (FDTS) was used to further make the glass super hydrophobic with contact angle of 151° without affecting its transparency. Polysilicon layer of 300 nm was deposited on glass substrate first and nanostructures were fabricated in this layer by metal assisted wet chemical etching. Thermal oxidation converted the silicon nanostructure to silicon dioxide nanostructure. This technology is producible on mass scale and useful in preparation of anti-fogging and self-cleaning glass.
Keywords :
contact angle; etching; glass; hydrophilicity; hydrophobicity; monolayers; nanofabrication; nanostructured materials; oxidation; self-assembly; transparency; FDTS; SiO2; antifogging glass; contact angle; glass nanostructures; glass substrate; mass scale; metal assisted wet chemical etching; perfluorodecyl-trichlorosilane; polysilicon layer; self-assembled monolayer; self-cleaning glass; silicon dioxide nanostructure; silicon nanostructure; size 300 nm; superhydrophobic-superhydrophilic transparent nanostructured glass; thermal oxidation; wet etching; Chemicals; Coatings; Etching; Glass; Metals; Nanostructures; Glass Nanostructure; Mask less lithography; Super hydrophilicity; Super hydrophobicity; Wet chemical etching;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on
Conference_Location :
Waikiki Beach, HI
Type :
conf
DOI :
10.1109/NEMS.2014.6908771
Filename :
6908771
Link To Document :
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