Semiconductor manufacturing process monitoring using built-in self-test for embedded memories

Author

Schanstra, Ivo ; Lukita, Dharmajaya ; Van de Goor, Ad J. ; Veelenturf, Kees ; Van Wijnen, Paul J.

Author_Institution

Philips Semicond., Nijmegen, Netherlands

fYear

1998

fDate

18-23 Oct 1998

Firstpage

872

Lastpage

881

Abstract

Memories are often used as a semiconductor manufacturing process monitoring vehicle. This paper describes a new memory built-in self-test (BIST) method that is used to monitor the semiconductor manufacturing process. For this purpose, this BIST method has the ability not only to generate a pass/fail verdict for the tested memory, but also to report additional information to be able to narrow down the type and the location of the failure mode that is causing the tested memory to fail. Also, it offers test algorithm flexibility. The described BIST method has successfully been implemented in a dedicated process monitoring chip that is now being used in large quantities

Keywords

built-in self test; embedded systems; fault diagnosis; integrated circuit manufacture; integrated memory circuits; process monitoring; random-access storage; built-in self-test; dedicated process monitoring chip; embedded memories; failure mode; pass/fail verdict; semiconductor manufacturing process monitoring; test algorithm flexibility; Application specific integrated circuits; Built-in self-test; Condition monitoring; Fault diagnosis; Feedback; Manufacturing processes; Random access memory; Read-write memory; Testing; Vehicles;

fLanguage

English

Publisher

ieee

Conference_Titel

Test Conference, 1998. Proceedings., International

Conference_Location

Washington, DC

ISSN

1089-3539

Print_ISBN

0-7803-5093-6

Type

conf

DOI

10.1109/TEST.1998.743277

Filename

743277