Title :
Superconducting multilayer structures with a thick SiO2 dielectric interlayer for multichip modules
Author :
Zhang, G.Q. ; Yao, H.J. ; Luo, W.A. ; Ang, S.S. ; Brown, W.D. ; Chan, F.T. ; Salamo, G.J.
Author_Institution :
Dept. of Phys., Arkansas Univ., Fayetteville, AR, USA
Abstract :
One of the most promising applications for high temperature superconductors (HTSCs) is for use as signal interconnects between bare integrated circuits (ICs) in multichip modules (MCMs). For HTSC MCM and other related electronic applications, it is necessary to fabricate several YBa2Cu3O7-x (YBCO) layers separated by thick low dielectric layers. In this work, YBCO/yttrium stabilized zirconia (YSZ)/SiO2/YSZ/YBCO multilayer structures have been successfully deposited with patterned YBCO layers on single-crystal YSZ substrates. A reactive sputtering technique was used to grow the SiO2 layer and the ion beam assisted deposition (IBAD) method was used to form biaxially aligned YSZ layers. In contrast to previously reported work, the top YBCO layer did not show any cracking. Using this process, a novel two-layer test vehicle was fabricated. A clock distribution circuit was mounted on the superconducting test vehicle to form a ring oscillator. The functionality of the test vehicle was found to be about 100 MHz
Keywords :
barium compounds; high-temperature superconductors; ion beam assisted deposition; multichip modules; silicon compounds; sputter deposition; superconducting interconnections; superconductor-insulator-superconductor devices; yttrium compounds; zirconium compounds; 100 MHz; IBAD method; Y2O3-ZrO2; YBCO/YSZ/SiO2/YSZ/YBCO multilayer structures; YBa2Cu3O7-x layers; YBa2Cu3O7-Y2O3 ZrO2-SiO2-Y2O3ZrO 2-YBa2Cu3O7; bare integrated circuits; biaxially aligned YSZ layers; clock distribution circuit; high temperature superconductors; multichip modules; patterned YBCO layers; reactive sputtering technique; ring oscillator; signal interconnects; single-crystal YSZ substrates; superconducting multilayer structures; superconducting test vehicle; thick SiO2 dielectric interlayer; two-layer test vehicle; Application specific integrated circuits; Circuit testing; Dielectric substrates; High temperature superconductors; Integrated circuit interconnections; Multichip modules; Nonhomogeneous media; Superconducting integrated circuits; Vehicles; Yttrium barium copper oxide;
Conference_Titel :
Properties and Applications of Dielectric Materials, 2000. Proceedings of the 6th International Conference on
Conference_Location :
Xi´an
Print_ISBN :
0-7803-5459-1
DOI :
10.1109/ICPADM.2000.876406
