A virtual gyroscope based-on a single-chip four-microgyroscope array

This paper establishes a virtual gyroscope based on a single-chip four-microgyroscope array. The four gyroscope array is integrated to a small area on a single chip by a silicon-on-insulator (SOI) process. As far as we know, this is the first reported virtual gyroscope system based on a single-chip gyroscope array. Test results show that scale factor of four single gyroscopes are 6.9mV/deg/s, 7.5mV/deg/s, 8.1mV/deg/s and 10.2mV/deg/s, respectively. The bias stability of the virtual gyroscope I maximumly improved from 0.042deg/s to 0.013deg/s, which is a 3.2 times improvement.