Nonlinearity investigation of the MEMS scanning mirror with electrostatic comb drive

Author

Peigang Deng ; Wei Ma

Author_Institution

Sch. of Sci., Wuhan Inst. of Technol., Wuhan, China

fYear

2014

fDate

13-16 April 2014

Firstpage

212

Lastpage

215

Abstract

In this work, we systematically investigate the nonlinear phenomenon of an electrostatic comb driven micro scanning mirror. The system governing equation is illustrated by Mathieu equation. A numerical model is built in MatLab based on the governing equation. The scanning mirror response in both time and frequency domain is simulated. Results are verified by the investigation vehicle, a fabricated MEMS scanning mirror. The experimental and simulation results have a great agreement on showing the similar parametric response and stiffness softening. Unstable region is also observed and well validated by the model.

Keywords

electrostatic devices; micromirrors; nonlinear optics; MEMS scanning mirror; MatLab; Mathieu equation; electrostatic comb drive; frequency domain; micro scanning mirror; nonlinear phenomenon; scanning mirror response; time domain; Electrostatics; Equations; Mathematical model; Micromechanical devices; Mirrors; Numerical models; Oscillators; Mathieu equation; electrostatic comb driven micro scanning mirror; nonlinear phenomenon; parameter response; stiffness softening;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on

Conference_Location

Waikiki Beach, HI

Type

conf

DOI

10.1109/NEMS.2014.6908793

Filename

6908793