Title :
Nonlinearity investigation of the MEMS scanning mirror with electrostatic comb drive
Author :
Peigang Deng ; Wei Ma
Author_Institution :
Sch. of Sci., Wuhan Inst. of Technol., Wuhan, China
Abstract :
In this work, we systematically investigate the nonlinear phenomenon of an electrostatic comb driven micro scanning mirror. The system governing equation is illustrated by Mathieu equation. A numerical model is built in MatLab based on the governing equation. The scanning mirror response in both time and frequency domain is simulated. Results are verified by the investigation vehicle, a fabricated MEMS scanning mirror. The experimental and simulation results have a great agreement on showing the similar parametric response and stiffness softening. Unstable region is also observed and well validated by the model.
Keywords :
electrostatic devices; micromirrors; nonlinear optics; MEMS scanning mirror; MatLab; Mathieu equation; electrostatic comb drive; frequency domain; micro scanning mirror; nonlinear phenomenon; scanning mirror response; time domain; Electrostatics; Equations; Mathematical model; Micromechanical devices; Mirrors; Numerical models; Oscillators; Mathieu equation; electrostatic comb driven micro scanning mirror; nonlinear phenomenon; parameter response; stiffness softening;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on
Conference_Location :
Waikiki Beach, HI
DOI :
10.1109/NEMS.2014.6908793
