Title :
Intermetallic compound growth mechanism and failure modes of flip chip solder bump with different UBM structure during electromigration
Author :
Yong-Sheng Zou ; Yu-Hsiang Hsiao ; Kwang-Lung Lin
Author_Institution :
Product Characterization, Adv. Semicond. Eng., Inc., Kaohsiung, Taiwan
Abstract :
The growth mechanisms of intermetallic compound (IMC) and the failure modes in flip chip solder joint induced by electric current stressing have been investigated for various UBM and substrate metallizations. The UBM investigated was TiCuCuNi/TiCuNi while the substrate metallizations include electroless Ni(P)/electroless Pd/immersion Au (ENEPIG) and organic solderability preservatives (OSP) Cu substrate. The investigation was conducted with 7kA/cm at 160 °C. The main IMCs formed in the TiCuNi-ENEPIG bump were the Ni3Sn4, PdSn4 and AuSn4 phases. The nucleation of (Pd, Ni)Sn4 on Ni3Sn4 layer and the dissolution of Au and Pd into the melting solder form the rod shape AuSn4 and PdSn4 IMCs. The ENEPIG layer acts as barrier layer that inhibits the Cu pad consumption and forms Ni3P layer under electric current stressing. Cu atoms from the Cu pad diffused through the Ni3P layer to form the Cu6Sn5 IMC at the interface instead of the Ni3Sn4 IMC. The main IMCs formed in the bumps with TiCuNi-Cu and the TiCuCuNi-Cu as UBM were the Cu6Sn5 IMC as expected. The failure after the electromigration test occurs either through the expedite consumption of the bottom Cu pad, where no Ni barrier layer, or through the formation of voids and cracks at the IMC/solder interface on the Ni UBM side. The mechanism of void and crack formation was discussed in detail in this study.
Keywords :
copper alloys; failure analysis; flip-chip devices; gold alloys; metallisation; nickel alloys; palladium alloys; solders; titanium alloys; AuSn4; Cu6Sn5; ENEPIG layer; IMC; Ni3P; Ni3Sn4; OSP substrate; PdSn4; TiCuCuNi-TiCuNi; UBM structure; barrier layer; crack formation; electric current stressing; electromigration; failure modes; flip chip solder bump; intermetallic compound growth mechanism; nucleation; organic solderability preservatives substrate; solder interface; solder joint; substrate metallizations; temperature 160 degC; void formation; Atomic layer deposition; Cathodes; Gold; Nickel; Resistance; Soldering; Tin;
Conference_Titel :
Electronics Packaging Technology Conference (EPTC), 2014 IEEE 16th
Conference_Location :
Singapore
DOI :
10.1109/EPTC.2014.7028311