DocumentCode
252756
Title
Nanorobotic processing of graphene for rapid device prototyping
Author
Zimmermann, S. ; Barragan, Sergio Alfredo Garnica ; Fatikow, Sergej
Author_Institution
Div. Microrobotics & Control Eng., Univ. of Oldenburg, Oldenburg, Germany
fYear
2014
fDate
13-16 April 2014
Firstpage
275
Lastpage
280
Abstract
This paper presents a nanorobotic platform tailored for rapid prototyping of graphene based devices. Applying the capabilities of this platform, a nanorobotic strategy is proposed that enables the identification, electrical characterization and integration of graphene into device structures without using any time-consuming lithography procedures. In this way, graphene based devices can be fabricated and classified within few hours, significantly reducing the effort and consequently the costs of device prototyping. As an example of this strategy, graphene flakes are characterized and subsequently transferred onto trench structures resulting in partially suspended areas suitable to study graphene based nanoelectromechanical systems.
Keywords
control engineering computing; graphene; industrial robots; nanoelectromechanical devices; nanofabrication; production engineering computing; rapid prototyping (industrial); graphene based devices; graphene flakes; nanoelectromechanical systems; nanorobotic processing; nanorobotic strategy; rapid device prototyping; trench structures; Graphene; Microscopy; Mobile robots; Nanoscale devices; Object recognition; Probes; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on
Conference_Location
Waikiki Beach, HI
Type
conf
DOI
10.1109/NEMS.2014.6908807
Filename
6908807
Link To Document