• DocumentCode
    252756
  • Title

    Nanorobotic processing of graphene for rapid device prototyping

  • Author

    Zimmermann, S. ; Barragan, Sergio Alfredo Garnica ; Fatikow, Sergej

  • Author_Institution
    Div. Microrobotics & Control Eng., Univ. of Oldenburg, Oldenburg, Germany
  • fYear
    2014
  • fDate
    13-16 April 2014
  • Firstpage
    275
  • Lastpage
    280
  • Abstract
    This paper presents a nanorobotic platform tailored for rapid prototyping of graphene based devices. Applying the capabilities of this platform, a nanorobotic strategy is proposed that enables the identification, electrical characterization and integration of graphene into device structures without using any time-consuming lithography procedures. In this way, graphene based devices can be fabricated and classified within few hours, significantly reducing the effort and consequently the costs of device prototyping. As an example of this strategy, graphene flakes are characterized and subsequently transferred onto trench structures resulting in partially suspended areas suitable to study graphene based nanoelectromechanical systems.
  • Keywords
    control engineering computing; graphene; industrial robots; nanoelectromechanical devices; nanofabrication; production engineering computing; rapid prototyping (industrial); graphene based devices; graphene flakes; nanoelectromechanical systems; nanorobotic processing; nanorobotic strategy; rapid device prototyping; trench structures; Graphene; Microscopy; Mobile robots; Nanoscale devices; Object recognition; Probes; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on
  • Conference_Location
    Waikiki Beach, HI
  • Type

    conf

  • DOI
    10.1109/NEMS.2014.6908807
  • Filename
    6908807