Fabrication of piezoelectric zinc oxide nanorods by Electrospraying method

Author

Wang, S.Y. ; Hung, K.H. ; Chen, Yu Christine ; Pan, C.T. ; Yen, C.K. ; Wang, W.C. ; Liu, Z.H.

Author_Institution

Dept. of Mech. & Electro-Mech. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung, Taiwan

fYear

2014

fDate

13-16 April 2014

Firstpage

378

Lastpage

381

Abstract

This study mainly used Electrospraying and Taguchi method to investigate the optimum process of piezoelectric Zinc oxide (ZnO) nanorods parameters. Zinc oxide seed layer was electrosprayed on Au/Chromium/Silicon substrates. The electric field is around 660 V/mm. In this study, ZnO was made in an array to characterize. We used X-ray diffraction (XRD), photoluminescence (PL) and field emission scanning electron microscopy (FE-SEM) to characterize the morphology and luminescence of ZnO nanorods. The result showed that with higher and longer of annealing temperature and time. Furthermore, this study was obtained optimum height at 3~5 um of piezoelectric Zinc Oxide nanorods by adopting the process of hydrothermal for 14 hours and with 90 degrees Celsius.

Keywords

II-VI semiconductors; Taguchi methods; X-ray diffraction; annealing; electrochemistry; field emission electron microscopy; nanofabrication; nanorods; photoluminescence; piezoelectric semiconductors; scanning electron microscopy; semiconductor growth; spray coating techniques; wide band gap semiconductors; zinc compounds; Au-Cr-Si; Au-chromium-silicon substrates; FESEM; Taguchi method; X-ray diffraction; XRD; ZnO; annealing temperature; electrospraying method; field emission scanning electron microscopy; hydrothermal process; morphology; photoluminescence; piezoelectric zinc oxide nanorods; size 3 mum to 5 mum; time 14 h; zinc oxide seed layer; Annealing; Arrays; Crystallization; Substrates; Temperature; Zinc oxide; Electrosparying; Ppizoelectric; Taguchi method; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on

Conference_Location

Waikiki Beach, HI

Type

conf

DOI

10.1109/NEMS.2014.6908831

Filename

6908831