Composition control of Bi2Sr2Can-1CunOy superconducting thin films by rf magnetron sputtering method

Author

Yamane, T. ; Kishida, S. ; Tanaka, H. ; Yoshikawa, H.

Author_Institution

Tottori Univ.

Volume

2

fYear

2006

fDate

25-29 Sept. 2006

Firstpage

592

Lastpage

595

Abstract

We deposited Bi₂Sr₂Ca₁Cu₂O_y (Bi-2212) superconducting thin films on MgO substrates with or without Al₂O₃ particles by the RF magnetron sputtering method. From the results, we found that optimum the distances between targets and substrates target-substrate distance, RF powers and substrate temperature for obtaining the Bi-2212 films on the MgO substrates were 5mm, 150W and 830degC, respectively. The Bi-2212 films were Bi-2212 single-phase and had the T_c of about 54K. The particle size and the distribution density of Al₂O₃ were controlled by annealing temperature. The Bi-2212/Al₂O₃/MgO film showed Bi-2212 single-phase, whereas did not show zero-resistance

Keywords

aluminium compounds; bismuth compounds; calcium compounds; magnesium compounds; sputter deposition; strontium compounds; superconducting thin films; 150 W; 830 C; Bi₂Sr₂CaCu₂O₈-Al ₂O₃-MgO; RF magnetron sputtering method; composition control; superconducting thin films; Annealing; Bismuth; Radio frequency; Size control; Sputtering; Strontium; Substrates; Superconducting magnets; Superconducting thin films; Temperature control;

fLanguage

English

Publisher

ieee

Conference_Titel

Discharges and Electrical Insulation in Vacuum, 2006. ISDEIV '06. International Symposium on

Conference_Location

Matsue

ISSN

1093-2941

Print_ISBN

1-4244-0191-7

Electronic_ISBN

1093-2941

Type

conf

DOI

10.1109/DEIV.2006.357371

Filename

4194952