Title :
Fabrication of spiral-shaped PVDF cantilever based vibration energy harvester
Author :
Wen Liu ; Mengdi Han ; Xuming Sun ; Haixia Zhang
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
Abstract :
Polyvinylidene fluoride (PVDF) has a strong piezoelectricity. With the piezoelectric coefficient of poled thin films as large as 6-7 pC/N, PVDF is becoming a popular material for the sensors and energy harvesting. However, the fabrication process of PVDF is a big challenge due to the physical and chemical properties of PVDF. In this paper, a spiral-shaped PVDF cantilever is fabricated to harvest vibration energy in the environment. Copper mass and silicon mass are added to the PVDF cantilever to reduce the resonant frequency. Series of MEMS fabrication process are utilized to realize the PVDF piezoelectric energy harvester.
Keywords :
cantilevers; energy harvesting; micromechanical devices; piezoelectricity; vibrations; MEMS fabrication; chemical properties; energy harvesting; physical properties; piezoelectric coefficient; piezoelectric energy harvester; piezoelectricity; polyvinylidene fluoride cantilever; sensors; thin films; vibration energy harvester; Copper; Electrodes; Etching; Fabrication; Films; Silicon; PVDF; copper mass; energy harvesting; silicon mass;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on
Conference_Location :
Waikiki Beach, HI
DOI :
10.1109/NEMS.2014.6908849
