Title :
Saw-Pirani vacuum sensor with a new functioning mode and a fast response time
Author :
Mercier, D. ; Bordel, G. ; Brunet-Manquat, P. ; Verrun, S. ; Elmazria, O. ; Sarry, F. ; Belgacem, B. ; Bounouar, J.
Author_Institution :
CEA-LETI-MINATEC, Grenoble, France
Abstract :
A Surface Acoustic Wave (SAW) Pirani vacuum sensor has been fabricated on a lithium niobate substrate and mounted on a printed circuit board. The pressure range of the sensor is at the state of the art, it is 10-5 mbar up to atmospheric pressure with a good sensitivity. Two functioning modes of the transducer have been tested and compared in term of sensitivity and response time. By changing the functioning mode of the sensor, it is shown in this paper that the response time can be divided by 60.
Keywords :
atmospheric pressure; surface acoustic wave sensors; transducers; LiNbO3; SAW-Pirani vacuum sensor; atmospheric pressure; fast response time; functioning mode; printed circuit board; surface acoustic wave Pirani vacuum sensor; transducer; Current measurement; Frequency measurement; Pressure measurement; Surface acoustic waves; Temperature measurement; Temperature sensors; Time factors; Pirani gauges; Surface Acoustic Wave sensor; Vacuum sensor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969122
