A 3-axis accelerometer and strain sensor system for building integrity monitoring

Author

Santana, J. ; van den Hoven, R. ; van Liempd, C. ; Colin, M. ; Saillen, N. ; Van Hoof, C.

Author_Institution

imec-Holst Centre, Eindhoven, Netherlands

fYear

2011

fDate

5-9 June 2011

Firstpage

36

Lastpage

39

Abstract

An Ultra-Low-Power readout architecture for capacitive MEMS-based accelerometers and strain sensors is presented. The system can read both accelerometers and strain sensors in a half-bridge configuration. The gain is controlled by integrating pulses from the excitation voltage allowing accurate control of the Signal-to-Noise ratio. A Figure-of-Merit of 4.41×10^-20 F√(W/Hz) was achieved for a sensor range of ±2.0g and ±20,000με over a 100Hz bandwidth. Residual motion artifacts are also cancelled by the system.

Keywords

accelerometers; capacitive sensors; microsensors; strain sensors; building integrity monitoring; capacitive MEMS-based accelerometers; residual motion artifacts; signal-to-noise ratio; strain sensor system; ultralow-power readout architecture; Accelerometers; Bandwidth; Capacitors; Fingers; Noise; Sensitivity; Strain; Signal-to-Noise ratio; bandwidth; integrated number of pulses; linearity; residual motion; sensitivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969127

Filename

5969127